What is Optical Disc Stamper and Negative Tone Electron Beam Resist?

Because of its many advantages, the optical disk became the favored medium for music, pictures, and software programs. Stamping a polycarbonate sheet to make CDs and DVDs is common, and nickel stampers are commonly used as a stamp with bumps that generate pits. The optical disc stamper resist’s quality determines the quality of the group of discs.

Read on to learn more about the optical disk stamper and the negative tone electron beam resist.

Understanding the Optical Disk Stamper

Firstly, optical disc manufacturing refers to the production of commercial optical discs. They’re compact, light, strong, and digital, with a data storage capacity of 650 megabytes at the very least (MB). A double-layered and double-sided DVD may hold up to 15.9 gigabytes (GB) of data. Optical disk stampers are molds that imprint images on the discs.

An optical disk stamper is a mold you can use to replicate polymer compact discs (CDs) in an injection molding machine in optical disc technology. On a 138-mm diameter substrate, the stamper surface has a negative image of the CDs with over 1 billion submicrometer details embossed in a spiral pattern.

A molding surface appears when bumps for imprinting pits onto an optical disk are available on one side of a stamper body. The bumps and the molding surface are made of a polymer resin with a heat diffusivity of less than 0.01 m2/h.

What is a Negative Tone Electron Beam Resist?

A negative tone electron beamresists a rougher line edge than a positive tone resists and can expose stitching faults in the field and subfield more easily than positive tone resists. Due to its inorganic composition, a negative tone electron beamresists great plasma etch resistance and extraordinary resolution, with some of the smallest characteristics visible.

On thin membrane substrates, HSQ limits EBL structures to 1-2 nm in size. It resists plasma etching well and can be used as an etch mask for pattern transfer directly.

When quality and economy are the most important factors, a negative acting resistor is the best choice for printed circuit boards. They reproduce images well and are chemically resistant. Negative resistance is a great option for semiconductor supply that doesn’t require a lot of precision.

Conclusion

HSQ, also known as Flowable Oxide (FOx), is a low-k dielectric with excellent planarization and gap-filling properties. You can use it as a back-end metal interlayer isolation dielectric. Again, you can use this negative tone electron beam resist for a wide range of applications because it can be coated using standard spin-coating methods.

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